紀要論文

非破壊検査におけるトモシンセシス技術の応用

Application of Tomosynthesis Technology in Non-Destructive Inspection Imaging

jpn

24368083

https://doi.org/10.15002/00026399

法政大学大学院理工学研究科

法政大学大学院紀要. 理工学研究科編

64

1

6

2023-03-24

Version of Record

In non-destructive inspection of substrates, a technique called X-ray tomosynthesis method has made it possible to inspect sliced layers. But inspection of precision machine substrate by a non-destructive inspection may miss small defective parts by the effect of pins for cooling process. The purpose of this study is to eliminate the effect of pins in substrate inspection and to improve image quality. The paper reviews the results of a rolling ball method, simple calculation method, band pass filter method, and deep image prior for removing pins. In addition, this paper also proposed that small defectives areas be made higher resolution by a super-resolution technique. Comparing the resultant images, the band-pass filtered reconstructed images showed the best results. In addition, super-resolution by machine learning was also found to be effective in improving image quality.

Article